Problem gasonics SNF 2010-08-30 21:09:48: wafer handeling problems

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Aug 31 11:52:27 PDT 2010


Adjusted the unload arm guides.  Also adjusted the load arm position.
Cycled about 60 wafers with no problems.




More information about the gasonics-pcs mailing list