From yeh at snf.stanford.edu Thu Feb 11 12:54:10 2010 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Thu, 11 Feb 2010 12:54:10 -0800 Subject: Problem gasonics SNF 2010-02-11 12:54:09: dropped wafer Message-ID: ashed two wafers. tool grabbed first wafer but dropped the wafer on the way into the chamber. the first wafer dropped outside the chamber onto the door track. tool then tried to grab the 2nd wafer but couldn't close door because the first wafer that fallen on the track of the door and the door can not close. removed wafer from the door tracks. system is running again but usersbeware. From mdickey at snf.stanford.edu Tue Feb 16 10:11:07 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 16 Feb 2010 10:11:07 -0800 Subject: Comment gasonics SNF 2010-02-16 10:11:06: Reboot Message-ID: Rebooted system and cycled 10 wafers with no problems From tura at snf.stanford.edu Tue Feb 16 20:31:04 2010 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 16 Feb 2010 20:31:04 -0800 Subject: Comment gasonics SNF 2010-02-16 20:31:03: RF Warning Message-ID: For long ashes (program 0177), RF Warning comes up every single time. From damodei at snf.stanford.edu Fri Feb 19 20:46:54 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Fri, 19 Feb 2010 20:46:54 -0800 Subject: Problem gasonics SNF 2010-02-19 20:46:53: "door not closed" error Message-ID: System thinks door is not closed -- won't run any wafers. From cbaxter at snf.stanford.edu Sat Feb 20 00:47:30 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 20 Feb 2010 00:47:30 -0800 Subject: Problem gasonics SNF 2010-02-19 20:46:53: "door not closed" error Message-ID: Cleared error and ran dummy wafer w/out problem. From cbaxter at snf.stanford.edu Sat Feb 20 00:47:51 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 20 Feb 2010 00:47:51 -0800 Subject: Problem gasonics SNF 2010-02-11 12:54:09: dropped wafer Message-ID: