From eenriquez at snf.stanford.edu Mon Jan 4 14:57:45 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Jan 2010 14:57:45 -0800 Subject: Shutdown gasonics SNF 2010-01-04 14:57:45: No gas 1 flow Message-ID: Gas 1 flows OK during the warm-up but 0 flow when running the recipe. Tried recipes 1 and 2, same results. From eenriquez at snf.stanford.edu Tue Jan 5 12:55:33 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Jan 2010 12:55:33 -0800 Subject: Shutdown gasonics SNF 2010-01-04 14:57:45: No gas 1 flow Message-ID: Re-entered gas flow setpoints in all the recipes. Ran 32 wafers with no problems. From wangss at snf.stanford.edu Thu Jan 14 22:21:15 2010 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Thu, 14 Jan 2010 22:21:15 -0800 Subject: Problem gasonics SNF 2010-01-14 22:21:14: wafer transfer problem Message-ID: it won't take wafers in From cbaxter at snf.stanford.edu Sat Jan 16 10:43:15 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 16 Jan 2010 10:43:15 -0800 Subject: Problem gasonics SNF 2010-01-14 22:21:14: wafer transfer problem Message-ID: Re-leveled nest basket.. From emyers at snf.stanford.edu Wed Jan 20 09:05:50 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 20 Jan 2010 09:05:50 -0800 Subject: Comment gasonics SNF 2009-12-02 14:59:21: Request to Shadow/Get trained on Gasonics Message-ID: From nvgirish at snf.stanford.edu Fri Jan 22 20:38:03 2010 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Fri, 22 Jan 2010 20:38:03 -0800 Subject: Problem gasonics SNF 2010-01-22 20:38:03: Itermittent hang up Message-ID: Cassette full error with screen hanging up. Crops up intermittently. From cbaxter at snf.stanford.edu Sat Jan 23 06:39:57 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 23 Jan 2010 06:39:57 -0800 Subject: Problem gasonics SNF 2010-01-22 20:38:03: Itermittent hang up Message-ID: Reser pick and place pcb. From klharris at snf.stanford.edu Mon Jan 25 22:53:21 2010 From: klharris at snf.stanford.edu (klharris at snf.stanford.edu) Date: Mon, 25 Jan 2010 22:53:21 -0800 Subject: Problem gasonics SNF 2010-01-25 22:53:21: error message; no reset Message-ID: Midway through processing my wafers, it displayed an error indicating that the receiver cassette was full (although there were only 4 wafers in it and not nearly full). I tried reseating the receiver cassette and emptying it, but the error message remained. I turned off the machine and removed my wafers, including the one that was stuck inside the machine. However, the door would not close afterwards. After turning the machine back on, it gave an error that the door was not closed. Pressing "start" or "stop" or reseating the cassettes did not yield a response. The machine never reset. It seems that several other lab members had similar experiences, although the machine would usually reset after turning back on. From mdickey at snf.stanford.edu Tue Jan 26 08:38:52 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 26 Jan 2010 08:38:52 -0800 Subject: Comment gasonics SNF 2010-01-26 08:38:51: door close Message-ID: Ran 5 wafers in recipe 1 with no problems From pponce at snf.stanford.edu Thu Jan 28 16:40:39 2010 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Thu, 28 Jan 2010 16:40:39 -0800 Subject: Problem gasonics SNF 2010-01-28 16:40:39: wafer stuck, same error Message-ID: The machine claims to have a full output cassette, the same error as reported recently. From pponce at snf.stanford.edu Thu Jan 28 20:41:53 2010 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Thu, 28 Jan 2010 20:41:53 -0800 Subject: Shutdown gasonics SNF 2010-01-28 20:41:52: see above problem. Message-ID: From eenriquez at snf.stanford.edu Fri Jan 29 09:55:36 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Jan 2010 09:55:36 -0800 Subject: Shutdown gasonics SNF 2010-01-28 20:41:52: see above problem. Message-ID: Reset the system and ran 12 wafers without a problem From eenriquez at snf.stanford.edu Fri Jan 29 09:56:04 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Jan 2010 09:56:04 -0800 Subject: Comment gasonics SNF 2010-01-26 08:38:51: door close Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jan 29 09:56:27 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Jan 2010 09:56:27 -0800 Subject: Problem gasonics SNF 2010-01-28 16:40:39: wafer stuck, same error Message-ID: Reset the system and recovered the user's wafer. From eenriquez at snf.stanford.edu Fri Jan 29 10:17:13 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Jan 2010 10:17:13 -0800 Subject: Comment gasonics SNF 2010-01-29 10:17:13: Update cassette full problem Message-ID: The problem is intermittent and it might be caused by a dirty connector. The plan is to pull the cassette assembly off next Wed and clean all the connectors. If the problem occurs, power the system OFF and ON. If the system faults during the system startup, for door not closed, load arn out or unload arm out, just push arm or door to the correct position. For example, if the door faults for door not closed. Push the chamber door closed and let go IMMEDIATELY. IMPORTANT: DO NOT PUSH THE OFFENDING COMPONENT FOR MORE THAN 1 SEC. It will try to move immediately in the opposite direction as soon as you push it.