Shutdown gasonics SNF 2010-01-04 14:57:45: No gas 1 flow

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jan 4 14:57:45 PST 2010


Gas 1 flows OK during the warm-up but 0 flow when running the recipe.  Tried recipes 1 and 2, same results.  




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