Comment gasonics SNF 2010-01-26 08:38:51: door close
mdickey at snf.stanford.edu
mdickey at snf.stanford.edu
Tue Jan 26 08:38:52 PST 2010
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Problem gasonics SNF 2010-01-25 22:53:21: error message; no reset
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Comment gasonics SNF 2010-01-26 08:38:51: door close
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Ran 5 wafers in recipe 1 with no problems
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Problem gasonics SNF 2010-01-25 22:53:21: error message; no reset
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Comment gasonics SNF 2010-01-26 08:38:51: door close
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