Shutdown gasonics SNF 2010-01-28 20:41:52: see above problem.
pponce at snf.stanford.edu
pponce at snf.stanford.edu
Thu Jan 28 20:41:53 PST 2010
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Problem gasonics SNF 2010-01-28 16:40:39: wafer stuck, same error
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Shutdown gasonics SNF 2010-01-28 20:41:52: see above problem.
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