Problem gasonics SNF 2010-01-28 16:40:39: wafer stuck, same error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 29 09:56:27 PST 2010

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Reset the system and recovered the user's wafer.

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Next message: Shutdown gasonics SNF 2010-01-28 20:41:52: see above problem.
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