From mdickey at snf.stanford.edu Thu Jul 1 07:40:23 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 1 Jul 2010 07:40:23 -0700 Subject: Comment gasonics SNF 2010-07-01 07:40:22: errors Message-ID: Ran 5 wafers without any problems. There seems to be intermittent errors for output cassette full and lost vacuum. Not sure why. Will consult Ceaser and Elmer when they come in. From jwpchen at snf.stanford.edu Thu Jul 1 16:34:35 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Thu, 1 Jul 2010 16:34:35 -0700 Subject: Comment gasonics SNF 2010-07-01 16:34:35: output cassette full Message-ID: happens for every single wafer running 0144, but at least it's recoverable now if i mash the buttons enough times... could we have a turbo button? From bchui at snf.stanford.edu Thu Jul 1 18:22:31 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 1 Jul 2010 18:22:31 -0700 Subject: Comment gasonics SNF 2010-07-01 18:22:31: Myriad of problems Message-ID: output cassette full error; output arm out error; (can get around by jiggling the output arm and power cycling the machine); outgoing wafer not sensed error (have to manually remove the wafer from the top slot of output cassette otherwise next wafer will ram into it cause cassette won't advance) From merwan at snf.stanford.edu Tue Jul 6 17:59:03 2010 From: merwan at snf.stanford.edu (merwan at snf.stanford.edu) Date: Tue, 6 Jul 2010 17:59:03 -0700 Subject: Shutdown gasonics SNF 2010-07-06 17:59:02: No wafer loading Message-ID: There is a problem with the losding arm, it does not grab the wafers. Vaccum seems to be present. I tried with several wafers to in case they were not flat and it still did not work From eenriquez at snf.stanford.edu Wed Jul 7 09:51:33 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 7 Jul 2010 09:51:33 -0700 Subject: Shutdown gasonics SNF 2010-07-06 17:59:02: No wafer loading Message-ID: Adjusted the load vacuum sensor. Ran 25 without any problems. From gth at snf.stanford.edu Mon Jul 19 16:48:46 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 19 Jul 2010 16:48:46 -0700 Subject: Problem gasonics SNF 2010-07-19 16:48:45: RF error on the 4th wafer. Message-ID: From gth at snf.stanford.edu Mon Jul 19 16:55:04 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 19 Jul 2010 16:55:04 -0700 Subject: Problem gasonics SNF 2010-07-19 16:55:04: RF error on recipe 044. Message-ID: Soory about the repeat message. I forgot to mention the recipe number. From jrjain at snf.stanford.edu Tue Jul 20 12:56:43 2010 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Tue, 20 Jul 2010 12:56:43 -0700 Subject: Problem gasonics SNF 2010-07-20 12:56:42: RF Problem: Recipe 044 Message-ID: Had same problem as Gaurav (gth) From jwpchen at snf.stanford.edu Tue Jul 20 19:50:27 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Tue, 20 Jul 2010 19:50:27 -0700 Subject: Problem gasonics SNF 2010-07-20 19:50:27: RF warning Message-ID: for each wafer, recipe 0144 From eenriquez at snf.stanford.edu Wed Jul 21 08:09:08 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Jul 2010 08:09:08 -0700 Subject: Comment gasonics SNF 2010-07-01 07:40:22: errors Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jul 21 08:09:15 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Jul 2010 08:09:15 -0700 Subject: Comment gasonics SNF 2010-05-28 08:11:25: test Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jul 21 08:09:27 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Jul 2010 08:09:27 -0700 Subject: Comment gasonics SNF 2010-05-21 09:37:06: Reliability check Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jul 21 08:10:35 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Jul 2010 08:10:35 -0700 Subject: Comment gasonics SNF 2010-06-25 13:18:51: test Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jul 21 11:11:14 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Jul 2010 11:11:14 -0700 Subject: Problem gasonics SNF 2010-07-19 16:48:45: RF error on the 4th wafer. Message-ID: Magnetron was over heating. Found the exhaust damper in the closed position. Fully opened the damper and ran 44 wafers using recipe 144 (130 sec process) with no problems. From eenriquez at snf.stanford.edu Wed Jul 21 11:11:20 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Jul 2010 11:11:20 -0700 Subject: Problem gasonics SNF 2010-07-19 16:55:04: RF error on recipe 044. Message-ID: Magnetron was over heating. Found the exhaust damper in the closed position. Fully opened the damper and ran 44 wafers using recipe 144 (130 sec process) with no problems. From eenriquez at snf.stanford.edu Wed Jul 21 11:11:26 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Jul 2010 11:11:26 -0700 Subject: Problem gasonics SNF 2010-07-20 12:56:42: RF Problem: Recipe 044 Message-ID: Magnetron was over heating. Found the exhaust damper in the closed position. Fully opened the damper and ran 44 wafers using recipe 144 (130 sec process) with no problems. From eenriquez at snf.stanford.edu Wed Jul 21 11:11:32 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Jul 2010 11:11:32 -0700 Subject: Problem gasonics SNF 2010-07-20 19:50:27: RF warning Message-ID: Magnetron was over heating. Found the exhaust damper in the closed position. Fully opened the damper and ran 44 wafers using recipe 144 (130 sec process) with no problems. From eenriquez at snf.stanford.edu Wed Jul 21 11:11:53 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Jul 2010 11:11:53 -0700 Subject: Comment gasonics SNF 2010-07-01 18:22:31: Myriad of problems Message-ID: Ran 44 wafers with no problems. From eenriquez at snf.stanford.edu Wed Jul 21 11:16:43 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Jul 2010 11:16:43 -0700 Subject: Problem gasonics SNF 2010-05-10 17:27:28: warning on cassette unloading Message-ID: Aligned the unload arm to the cassette and adjusted the load arm speed. From ludwig at snf.stanford.edu Wed Jul 21 11:58:07 2010 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Wed, 21 Jul 2010 11:58:07 -0700 Subject: Problem gasonics SNF 2010-07-21 11:58:07: Door not closing Message-ID: the door is open, cannot clear error From carterlin at snf.stanford.edu Wed Jul 21 22:24:47 2010 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Wed, 21 Jul 2010 22:24:47 -0700 Subject: Shutdown gasonics SNF 2010-07-21 22:24:46: door close and output arm errors Message-ID: cannot resolve errors by restarting the machine From jrjain at snf.stanford.edu Wed Jul 21 23:04:54 2010 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 21 Jul 2010 23:04:54 -0700 Subject: Comment gasonics SNF 2010-07-21 23:04:54: Door/Output arms problems fixed... Message-ID: ..but tool can't be used because of shutdown status. From eenriquez at snf.stanford.edu Thu Jul 22 15:26:38 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Jul 2010 15:26:38 -0700 Subject: Shutdown gasonics SNF 2010-07-21 22:24:46: door close and output arm errors Message-ID: Installed a cooling line for the output cassette control board. Cycled 170 wafers with no problems. From eenriquez at snf.stanford.edu Fri Jul 23 07:41:36 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Jul 2010 07:41:36 -0700 Subject: Comment gasonics SNF 2010-07-21 23:04:54: Door/Output arms problems fixed... Message-ID: Shutdown status removed From eenriquez at snf.stanford.edu Fri Jul 23 14:41:16 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Jul 2010 14:41:16 -0700 Subject: Problem gasonics SNF 2010-07-21 11:58:07: Door not closing Message-ID: Installed a cooling line for the output cassette control board. Cycled 170 wafers with no problems. From eenriquez at snf.stanford.edu Fri Jul 23 14:41:41 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Jul 2010 14:41:41 -0700 Subject: Comment gasonics SNF 2010-07-01 16:34:35: output cassette full Message-ID: Installed a cooling line for the output cassette control board. Cycled 170 wafers with no problems. From eenriquez at snf.stanford.edu Fri Jul 23 14:41:52 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Jul 2010 14:41:52 -0700 Subject: Comment gasonics SNF 2010-06-30 16:52:19: Cannot clear error; keys stuck Message-ID: Installed a cooling line for the output cassette control board. Cycled 170 wafers with no problems. From eenriquez at snf.stanford.edu Fri Jul 23 14:42:31 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Jul 2010 14:42:31 -0700 Subject: Problem gasonics SNF 2010-06-29 17:30:39: output cassette full Message-ID: Installed a cooling line for the output cassette control board. Cycled 170 wafers with no problems. From eenriquez at snf.stanford.edu Mon Jul 26 07:47:47 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Jul 2010 07:47:47 -0700 Subject: Problem gasonics SNF 2010-06-24 04:08:47: unload arm lost vacuum Message-ID: Adjusted the output cassette position. From eenriquez at snf.stanford.edu Mon Jul 26 07:47:59 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Jul 2010 07:47:59 -0700 Subject: Comment gasonics SNF 2010-06-25 17:36:58: unload arm lost vaccum error again Message-ID: Adjusted the output cassette position. From eenriquez at snf.stanford.edu Mon Jul 26 14:38:24 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Jul 2010 14:38:24 -0700 Subject: Comment gasonics SNF 2010-07-26 14:38:23: Update Output cassette full problem Message-ID: Output cassette full error has not re-occured since installing a cooling line to the output cassette control board. We have cycled about 400 wafers without a problem. We will continue to monitor the problem. From eenriquez at snf.stanford.edu Thu Jul 29 09:19:28 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 29 Jul 2010 09:19:28 -0700 Subject: Comment gasonics SNF 2010-07-29 09:19:28: Tested OK after power outtage Message-ID: