Comment gasonics SNF 2010-07-01 07:40:22: errors

mdickey at snf.stanford.edu mdickey at snf.stanford.edu
Thu Jul 1 07:40:23 PDT 2010


Ran 5 wafers without any problems. There seems to be intermittent
errors for output cassette full and lost vacuum. Not sure why. Will 
consult Ceaser and Elmer when they come in.




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