Comment gasonics SNF 2010-07-01 18:22:31: Myriad of problems

bchui at snf.stanford.edu bchui at snf.stanford.edu
Thu Jul 1 18:22:31 PDT 2010


output cassette full error;
output arm out error; (can get around by jiggling the output arm and power cycling the machine);
outgoing wafer not sensed error (have to manually remove the wafer from the top slot of output cassette otherwise next wafer will ram into it cause cassette won't advance)




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