Shutdown gasonics SNF 2010-07-06 17:59:02: No wafer loading

merwan at snf.stanford.edu merwan at snf.stanford.edu
Tue Jul 6 17:59:03 PDT 2010


There is a problem with the losding arm, it does not grab the wafers. Vaccum seems to be present. I tried with several wafers to in case they were not flat and it still did not work




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