Problem gasonics SNF 2010-07-19 16:48:45: RF error on the 4th wafer.
gth at snf.stanford.edu
gth at snf.stanford.edu
Mon Jul 19 16:48:46 PDT 2010
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Shutdown gasonics SNF 2010-07-06 17:59:02: No wafer loading
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Problem gasonics SNF 2010-07-19 16:48:45: RF error on the 4th wafer.
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Problem gasonics SNF 2010-07-19 16:48:45: RF error on the 4th wafer.
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