Problem gasonics SNF 2010-07-20 19:50:27: RF warning

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jul 21 11:11:32 PDT 2010


Magnetron was over heating.  Found the exhaust damper in the closed position.  Fully opened the damper and ran 44 wafers using recipe 144 (130 sec process) with no problems.




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