Comment gasonics SNF 2010-07-01 16:34:35: output cassette full
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Jul 23 14:41:41 PDT 2010
Installed a cooling line for the output cassette control board. Cycled
170 wafers with no problems.
More information about the gasonics-pcs
mailing list