Problem gasonics SNF 2010-06-29 17:30:39: output cassette full

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jul 23 14:42:31 PDT 2010


Installed a cooling line for the output cassette control board.  Cycled 
170 wafers with no problems. 




More information about the gasonics-pcs mailing list