From ginel at snf.stanford.edu  Thu Jun 10 09:41:38 2010
From: ginel at snf.stanford.edu (ginel at snf.stanford.edu)
Date: Thu, 10 Jun 2010 09:41:38 -0700
Subject: Problem gasonics SNF 2010-06-10 09:41:38: bad robotics dropping wafer
Message-ID: <mailman.626.1356281735.3883.gasonics-pcs@snf.stanford.edu>

The robot arm tried to place the wafer in the receive cassette, but the vertical alignment was off between the receive cassette and the wafer.  The wafer crashed into the cassette and fell off the robot arm.  



From mdickey at snf.stanford.edu  Thu Jun 10 10:30:04 2010
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Thu, 10 Jun 2010 10:30:04 -0700
Subject: Comment gasonics SNF 2010-06-10 10:30:04: tested
Message-ID: <mailman.627.1356281735.3883.gasonics-pcs@snf.stanford.edu>

Ran 8 wafers no problems



From eenriquez at snf.stanford.edu  Mon Jun 14 09:24:41 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 14 Jun 2010 09:24:41 -0700
Subject: Problem gasonics SNF 2010-06-10 09:41:38: bad robotics dropping wafer
Message-ID: <mailman.628.1356281735.3883.gasonics-pcs@snf.stanford.edu>

Mike tested it. No problem found.



From eenriquez at snf.stanford.edu  Mon Jun 14 09:24:47 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 14 Jun 2010 09:24:47 -0700
Subject: Comment gasonics SNF 2010-06-10 10:30:04: tested
Message-ID: <mailman.629.1356281735.3883.gasonics-pcs@snf.stanford.edu>

Archived



From yoneoka at snf.stanford.edu  Wed Jun 16 19:15:14 2010
From: yoneoka at snf.stanford.edu (yoneoka at snf.stanford.edu)
Date: Wed, 16 Jun 2010 19:15:14 -0700
Subject: Problem gasonics SNF 2010-06-16 19:15:13: output casset full error
Message-ID: <mailman.630.1356281735.3883.gasonics-pcs@snf.stanford.edu>

gasonic was showing "output casset full" error and I could not start my process.



From jwpchen at snf.stanford.edu  Thu Jun 24 04:08:48 2010
From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu)
Date: Thu, 24 Jun 2010 04:08:48 -0700
Subject: Problem gasonics SNF 2010-06-24 04:08:47: unload arm lost vacuum
Message-ID: <mailman.631.1356281735.3883.gasonics-pcs@snf.stanford.edu>

'unload arm lost vacuum' error for each wafer processed



From mdickey at snf.stanford.edu  Fri Jun 25 13:18:51 2010
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 25 Jun 2010 13:18:51 -0700
Subject: Comment gasonics SNF 2010-06-25 13:18:51: test
Message-ID: <mailman.632.1356281735.3883.gasonics-pcs@snf.stanford.edu>

cycled 5 wafers with no problems



From jwpchen at snf.stanford.edu  Fri Jun 25 17:36:58 2010
From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu)
Date: Fri, 25 Jun 2010 17:36:58 -0700
Subject: Comment gasonics SNF 2010-06-25 17:36:58: unload arm lost vaccum error again
Message-ID: <mailman.633.1356281735.3883.gasonics-pcs@snf.stanford.edu>

'unload arm lost vacuum' error for each wafer processed, maybe machine doesn't like fresh double-polished bare silicon wafers? it seems the unload arm crashes into receiver cassette, wafer shears off unload arm which breaks vacuum



From jwpchen at snf.stanford.edu  Tue Jun 29 17:30:40 2010
From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu)
Date: Tue, 29 Jun 2010 17:30:40 -0700
Subject: Problem gasonics SNF 2010-06-29 17:30:39: output cassette full
Message-ID: <mailman.634.1356281735.3883.gasonics-pcs@snf.stanford.edu>

buttons don't respond



From usha at snf.stanford.edu  Wed Jun 30 16:52:20 2010
From: usha at snf.stanford.edu (usha at snf.stanford.edu)
Date: Wed, 30 Jun 2010 16:52:20 -0700
Subject: Comment gasonics SNF 2010-06-30 16:52:19: Cannot clear error; keys stuck
Message-ID: <mailman.635.1356281735.3883.gasonics-pcs@snf.stanford.edu>

Could not get tool to operate.  Error message - Clearing wafer path;    output casssette full