Problem gasonics SNF 2010-06-10 09:41:38: bad robotics dropping wafer

ginel at snf.stanford.edu ginel at snf.stanford.edu
Thu Jun 10 09:41:38 PDT 2010


The robot arm tried to place the wafer in the receive cassette, but the vertical alignment was off between the receive cassette and the wafer.  The wafer crashed into the cassette and fell off the robot arm.  




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