Comment gasonics SNF 2010-06-25 13:18:51: test
mdickey at snf.stanford.edu
mdickey at snf.stanford.edu
Fri Jun 25 13:18:51 PDT 2010
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Problem gasonics SNF 2010-06-24 04:08:47: unload arm lost vacuum
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Comment gasonics SNF 2010-06-25 17:36:58: unload arm lost vaccum error again
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cycled 5 wafers with no problems
Previous message:
Problem gasonics SNF 2010-06-24 04:08:47: unload arm lost vacuum
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Comment gasonics SNF 2010-06-25 17:36:58: unload arm lost vaccum error again
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