Comment gasonics SNF 2010-06-25 17:36:58: unload arm lost vaccum error again

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Fri Jun 25 17:36:58 PDT 2010


'unload arm lost vacuum' error for each wafer processed, maybe machine doesn't like fresh double-polished bare silicon wafers? it seems the unload arm crashes into receiver cassette, wafer shears off unload arm which breaks vacuum




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