From latta at snf.stanford.edu  Tue Mar  2 13:55:03 2010
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 2 Mar 2010 13:55:03 -0800
Subject: Comment gasonics SNF 2010-03-02 13:55:02: I was able to 'baby' my wafers through....
Message-ID: <mailman.585.1356281735.3883.gasonics-pcs@snf.stanford.edu>

after getting RF error on each wafers.  Just use start to resume after ashing is completed.



From rhenn at snf.stanford.edu  Tue Mar  2 22:22:39 2010
From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu)
Date: Tue, 2 Mar 2010 22:22:39 -0800
Subject: Problem gasonics SNF 2010-03-02 22:22:39: Error: Cassette Full
Message-ID: <mailman.586.1356281735.3883.gasonics-pcs@snf.stanford.edu>

Also. got the error that the cassette is full when it is not.



From nharjee at snf.stanford.edu  Sun Mar  7 13:56:17 2010
From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu)
Date: Sun, 7 Mar 2010 13:56:17 -0800
Subject: Problem gasonics SNF 2010-03-07 13:56:16: Broken wafer
Message-ID: <mailman.587.1356281735.3883.gasonics-pcs@snf.stanford.edu>

Gasonics mishandled my wafer which caused it to break. I cleaned it up as much as possible.



From usha at snf.stanford.edu  Tue Mar  9 09:54:16 2010
From: usha at snf.stanford.edu (usha at snf.stanford.edu)
Date: Tue, 9 Mar 2010 09:54:16 -0800
Subject: Comment gasonics SNF 2010-03-09 09:54:15: Wafer broke
Message-ID: <mailman.588.1356281735.3883.gasonics-pcs@snf.stanford.edu>

Ran 2 wafers one broke.  Next did not..



From eenriquez at snf.stanford.edu  Thu Mar 11 11:21:01 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 11 Mar 2010 11:21:01 -0800
Subject: Problem gasonics SNF 2010-03-07 13:56:16: Broken wafer
Message-ID: <mailman.589.1356281735.3883.gasonics-pcs@snf.stanford.edu>

Installed metering valves to regulate the speed of the robot arms.  Also adjusted the wafer pins leveling.  Ran 24 wafers with no problems.



From eenriquez at snf.stanford.edu  Thu Mar 11 11:21:06 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 11 Mar 2010 11:21:06 -0800
Subject: Comment gasonics SNF 2010-03-09 09:54:15: Wafer broke
Message-ID: <mailman.590.1356281735.3883.gasonics-pcs@snf.stanford.edu>

Installed metering valves to regulate the speed of the robot arms.  Also adjusted the wafer pins leveling.  Ran 24 wafers with no problems.



From eenriquez at snf.stanford.edu  Thu Mar 11 14:29:15 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 11 Mar 2010 14:29:15 -0800
Subject: Comment gasonics SNF 2010-02-16 10:11:06: Reboot
Message-ID: <mailman.591.1356281735.3883.gasonics-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Tue Mar 16 13:13:47 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 16 Mar 2010 13:13:47 -0700
Subject: Problem gasonics SNF 2010-03-02 22:22:39: Error: Cassette Full
Message-ID: <mailman.592.1356281735.3883.gasonics-pcs@snf.stanford.edu>

Cycled 50 wafers with no problems



From eenriquez at snf.stanford.edu  Tue Mar 16 13:19:37 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 16 Mar 2010 13:19:37 -0700
Subject: Comment gasonics SNF 2010-03-16 13:19:36: RF warning update
Message-ID: <mailman.593.1356281735.3883.gasonics-pcs@snf.stanford.edu>

Ran 50 wafers using recipe 13 ( ~60 sec) with no problems.  Ran 3 wafers using recipe 177 (210 sec).  One wafer faulted for RF warning



From cbaxter at snf.stanford.edu  Sat Mar 27 10:22:25 2010
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sat, 27 Mar 2010 10:22:25 -0700
Subject: Comment gasonics SNF 2010-03-27 10:22:23: RF error
Message-ID: <mailman.594.1356281735.3883.gasonics-pcs@snf.stanford.edu>

Were ordering a new magnatron to fix the intermittent
rf warning error.