Problem gasonics SNF 2010-03-07 13:56:16: Broken wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Mar 11 11:21:01 PST 2010


Installed metering valves to regulate the speed of the robot arms.  Also adjusted the wafer pins leveling.  Ran 24 wafers with no problems.




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