Comment gasonics SNF 2010-03-16 13:19:36: RF warning update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Mar 16 13:19:37 PDT 2010


Ran 50 wafers using recipe 13 ( ~60 sec) with no problems.  Ran 3 wafers using recipe 177 (210 sec).  One wafer faulted for RF warning




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