From rhenn at snf.stanford.edu Fri May 7 19:06:31 2010 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Fri, 7 May 2010 19:06:31 -0700 Subject: Problem gasonics SNF 2010-05-07 19:06:30: got output cassette full error Message-ID: Got output casettee full error even when empty. tried picking up and placing the cassette. had to jiggle the electronics to get it to work. From mtan at snf.stanford.edu Mon May 10 17:27:29 2010 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Mon, 10 May 2010 17:27:29 -0700 Subject: Problem gasonics SNF 2010-05-10 17:27:28: warning on cassette unloading Message-ID: The unload arm broke one of my wafer when it over inserted my wafer into the cassette. Keep an eye on it while it unloads. From gyama at snf.stanford.edu Tue May 11 11:08:37 2010 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 11 May 2010 11:08:37 -0700 Subject: Shutdown gasonics SNF 2010-05-11 11:08:37: cassette thinks it is full Message-ID: wafer still in chamber From gyama at snf.stanford.edu Tue May 11 12:22:06 2010 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 11 May 2010 12:22:06 -0700 Subject: Comment gasonics SNF 2010-05-11 12:22:06: got wafer out of chamber Message-ID: From eenriquez at snf.stanford.edu Wed May 12 10:22:02 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 May 2010 10:22:02 -0700 Subject: Shutdown gasonics SNF 2010-05-11 11:08:37: cassette thinks it is full Message-ID: Reset the system, ran many wafers without a problem. From eenriquez at snf.stanford.edu Wed May 12 10:22:10 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 May 2010 10:22:10 -0700 Subject: Comment gasonics SNF 2010-05-11 12:22:06: got wafer out of chamber Message-ID: Archived From cursive at snf.stanford.edu Sat May 15 15:21:16 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sat, 15 May 2010 15:21:16 -0700 Subject: Problem gasonics SNF 2010-05-15 15:21:15: arm lift up problem Message-ID: Arm can't lift up wafer well in receving side From jwpchen at snf.stanford.edu Sat May 15 16:06:31 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Sat, 15 May 2010 16:06:31 -0700 Subject: Problem gasonics SNF 2010-05-15 16:06:30: loader arm Message-ID: loader arm also has trouble acquiring wafers... tried different wafers, same result From cbaxter at snf.stanford.edu Mon May 17 00:00:53 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 May 2010 00:00:53 -0700 Subject: Problem gasonics SNF 2010-05-15 16:06:30: loader arm Message-ID: Adjusted vacuum switch.. From cbaxter at snf.stanford.edu Mon May 17 00:01:26 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 May 2010 00:01:26 -0700 Subject: Problem gasonics SNF 2010-05-15 15:21:15: arm lift up problem Message-ID: adjusted unload arm.. From king at snf.stanford.edu Mon May 17 22:27:03 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 17 May 2010 22:27:03 -0700 Subject: Problem gasonics SNF 2010-05-17 22:27:02: Error: receiving cassette full Message-ID: Same old error again. Processing is stopped until it's working again. From king at snf.stanford.edu Mon May 17 22:28:14 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 17 May 2010 22:28:14 -0700 Subject: Comment gasonics SNF 2010-05-17 22:28:14: Same error for previous user Message-ID: it failed for him too but he didn't report it. From dongrip at snf.stanford.edu Tue May 18 06:24:19 2010 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Tue, 18 May 2010 06:24:19 -0700 Subject: Problem gasonics SNF 2010-05-18 06:24:19: output cassette full Message-ID: Same error From mdickey at snf.stanford.edu Wed May 19 09:24:00 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 19 May 2010 09:24:00 -0700 Subject: Shutdown gasonics SNF 2010-05-19 09:24:00: problem Message-ID: Investigatiing load problems From eenriquez at snf.stanford.edu Thu May 20 15:25:17 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 20 May 2010 15:25:17 -0700 Subject: Shutdown gasonics SNF 2010-05-19 09:24:00: problem Message-ID: Cleaned and lubricated the unload arm cylinder. Adjusted the unload arm up position height. Cycled about 60 wafers with no problems. We will continue to monitor the handling problem. From eenriquez at snf.stanford.edu Fri May 21 09:37:06 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 May 2010 09:37:06 -0700 Subject: Comment gasonics SNF 2010-05-21 09:37:06: Reliability check Message-ID: Ran 75 wafers with no problems. From jwpchen at snf.stanford.edu Thu May 27 22:03:06 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Thu, 27 May 2010 22:03:06 -0700 Subject: Problem gasonics SNF 2010-05-27 22:03:06: output cassette full error Message-ID: saw output cassette full error for each wafer. problem sometimes goes away after multiple attempts at replacing cassette and hitting resume. but one time the keypad also froze, and need to reset machine to recover wafer. From mdickey at snf.stanford.edu Fri May 28 08:11:25 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 28 May 2010 08:11:25 -0700 Subject: Comment gasonics SNF 2010-05-28 08:11:25: test Message-ID: Ran 11 wafers with no problems From bchui at snf.stanford.edu Mon May 31 21:31:50 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 31 May 2010 21:31:50 -0700 Subject: Problem gasonics SNF 2010-05-31 21:31:50: Still has O/P cassette full errors Message-ID: