Problem gasonics SNF 2010-05-10 17:27:28: warning on cassette unloading
mtan at snf.stanford.edu
mtan at snf.stanford.edu
Mon May 10 17:27:29 PDT 2010
The unload arm broke one of my wafer when it over inserted my wafer into the cassette. Keep an eye on it while it unloads.
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