Problem gasonics SNF 2010-05-10 17:27:28: warning on cassette unloading

mtan at snf.stanford.edu mtan at snf.stanford.edu
Mon May 10 17:27:29 PDT 2010


The unload arm broke one of my wafer when it over inserted my wafer into the cassette.  Keep an eye on it while it unloads.




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