Shutdown gasonics SNF 2010-05-11 11:08:37: cassette thinks it is full
gyama at snf.stanford.edu
gyama at snf.stanford.edu
Tue May 11 11:08:37 PDT 2010
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Problem gasonics SNF 2010-05-10 17:27:28: warning on cassette unloading
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Shutdown gasonics SNF 2010-05-11 11:08:37: cassette thinks it is full
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wafer still in chamber
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Problem gasonics SNF 2010-05-10 17:27:28: warning on cassette unloading
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Shutdown gasonics SNF 2010-05-11 11:08:37: cassette thinks it is full
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