Shutdown gasonics SNF 2010-05-19 09:24:00: problem

eenriquez at eenriquez at
Thu May 20 15:25:17 PDT 2010

Cleaned and lubricated the unload arm cylinder.  Adjusted the unload arm up position height.  Cycled about 60 wafers with no problems.
We will continue to monitor the handling problem.

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