Shutdown gasonics SNF 2010-05-19 09:24:00: problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu May 20 15:25:17 PDT 2010


Cleaned and lubricated the unload arm cylinder.  Adjusted the unload arm up position height.  Cycled about 60 wafers with no problems.
We will continue to monitor the handling problem.




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