Comment gasonics SNF 2010-05-21 09:37:06: Reliability check
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri May 21 09:37:06 PDT 2010
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Ran 75 wafers with no problems.
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Shutdown gasonics SNF 2010-05-19 09:24:00: problem
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Problem gasonics SNF 2010-05-27 22:03:06: output cassette full error
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