Problem gasonics SNF 2010-05-27 22:03:06: output cassette full error

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Thu May 27 22:03:06 PDT 2010


saw output cassette full error for each wafer. problem sometimes goes away after multiple attempts at replacing cassette and hitting resume. but one time the keypad also froze, and need to reset machine to recover wafer.




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