From narii at snf.stanford.edu  Mon Nov  1 00:50:50 2010
From: narii at snf.stanford.edu (narii at snf.stanford.edu)
Date: Mon, 1 Nov 2010 00:50:50 -0700
Subject: Problem gasonics SNF 2010-11-01 00:50:49: Unable to close chamber
Message-ID: <mailman.741.1356281736.3883.gasonics-pcs@snf.stanford.edu>

It lost vacuum while handling the wafer out from the chamber. It keeps searching for it, so I restarted the machine. However, since chamber is open and wafer handler is in the way of the chamber door, it cannot be initialized.



From mdickey at snf.stanford.edu  Mon Nov  1 09:00:50 2010
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 1 Nov 2010 09:00:50 -0700
Subject: Problem gasonics SNF 2010-11-01 00:50:49: Unable to close chamber
Message-ID: <mailman.742.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Ran 20 wafers. Could not duplicate problem



From eenriquez at snf.stanford.edu  Mon Nov  1 11:24:30 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 1 Nov 2010 11:24:30 -0700
Subject: Problem gasonics SNF 2010-10-29 14:56:53: lost vacuum cause wafer to break during unloading
Message-ID: <mailman.743.1356281736.3883.gasonics-pcs@snf.stanford.edu>

No problem found.  Cycled 20 wafers. 



From latta at snf.stanford.edu  Thu Nov 18 16:11:57 2010
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 18 Nov 2010 16:11:57 -0800
Subject: Shutdown gasonics SNF 2010-11-18 16:11:56: loader went hinky!
Message-ID: <mailman.744.1356281736.3883.gasonics-pcs@snf.stanford.edu>

the wafers was being unloaded and the loader dropped (and broke) the wafer and snapped back inot the chamber. (???)



From eenriquez at snf.stanford.edu  Fri Nov 19 12:04:40 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 19 Nov 2010 12:04:40 -0800
Subject: Shutdown gasonics SNF 2010-11-18 16:11:56: loader went hinky!
Message-ID: <mailman.745.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Removed dropped wafer.  Cycled 80 wafers without problems.



From eenriquez at snf.stanford.edu  Mon Nov 22 09:35:11 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 22 Nov 2010 09:35:11 -0800
Subject: Shutdown gasonics SNF 2010-11-22 09:35:10: Handler problem
Message-ID: <mailman.746.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Unloader arm not sensing vacuum.



From eenriquez at snf.stanford.edu  Mon Nov 22 10:54:53 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 22 Nov 2010 10:54:53 -0800
Subject: Shutdown gasonics SNF 2010-11-22 09:35:10: Handler problem
Message-ID: <mailman.747.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Got rid of warped wafers.



From daesung at snf.stanford.edu  Mon Nov 22 18:32:41 2010
From: daesung at snf.stanford.edu (daesung at snf.stanford.edu)
Date: Mon, 22 Nov 2010 18:32:41 -0800
Subject: Problem gasonics SNF 2010-11-22 18:32:41: Wafer handling problem
Message-ID: <mailman.748.1356281736.3883.gasonics-pcs@snf.stanford.edu>

At the sender cassette. Okay to run one wafer at a time.



From eenriquez at snf.stanford.edu  Mon Nov 29 09:05:06 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 29 Nov 2010 09:05:06 -0800
Subject: Problem gasonics SNF 2010-11-22 18:32:41: Wafer handling problem
Message-ID: <mailman.749.1356281736.3883.gasonics-pcs@snf.stanford.edu>

No problem found.  Cycled 20 wafers with no errors.