From wslee at snf.stanford.edu Fri Sep 3 14:59:16 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Fri, 3 Sep 2010 14:59:16 -0700 Subject: Problem gasonics SNF 2010-09-03 14:59:15: Input arm catching on wafer Message-ID: Wafer moves to the fingers without any problem. When the loader moves back to the left, it hits the side of the wafer. From cfchiang at snf.stanford.edu Fri Sep 3 15:55:14 2010 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Fri, 3 Sep 2010 15:55:14 -0700 Subject: Problem gasonics SNF 2010-09-03 15:55:13: handling problem Message-ID: when the sending arm returned to it's idle position, it hit the wafer. this happened twice in a row From grahamab at snf.stanford.edu Sun Sep 5 13:23:41 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 5 Sep 2010 13:23:41 -0700 Subject: Problem gasonics SNF 2010-09-05 13:23:41: severe handling problems Message-ID: avoid use if you do not know how to operate it in manual mode so that you can swap wafers on and off to avoid the loading problems. currently the load arm hits the wafer carrier on the way out and the unload arm hits the wafer on the way to pick it up (knocking it off the carrier altogether). definitely not safe to use on valuable wafers in automatic mode. From wanglele501 at snf.stanford.edu Mon Sep 6 15:00:47 2010 From: wanglele501 at snf.stanford.edu (wanglele501 at snf.stanford.edu) Date: Mon, 6 Sep 2010 15:00:47 -0700 Subject: Problem gasonics SNF 2010-09-06 15:00:46: wafer can not load correctly Message-ID: From wslee at snf.stanford.edu Tue Sep 7 15:34:32 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 7 Sep 2010 15:34:32 -0700 Subject: Problem gasonics SNF 2010-09-07 15:34:32: load arm better, output arm still bad Message-ID: Do not attempt to use in auto mode; requires close supervision to operate. From mdickey at snf.stanford.edu Wed Sep 8 10:27:09 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 8 Sep 2010 10:27:09 -0700 Subject: Shutdown gasonics SNF 2010-09-08 10:27:08: handling Message-ID: System down for handling issues From cbaxter at snf.stanford.edu Wed Sep 8 11:56:55 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 8 Sep 2010 11:56:55 -0700 Subject: Shutdown gasonics SNF 2010-09-08 10:27:08: handling Message-ID: Reseated unload arm.. From wanglele501 at snf.stanford.edu Wed Sep 8 17:25:51 2010 From: wanglele501 at snf.stanford.edu (wanglele501 at snf.stanford.edu) Date: Wed, 8 Sep 2010 17:25:51 -0700 Subject: Problem gasonics SNF 2010-09-08 17:25:51: dropped wafer during unload Message-ID: From bchui at snf.stanford.edu Wed Sep 8 19:00:05 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Wed, 8 Sep 2010 19:00:05 -0700 Subject: Comment gasonics SNF 2010-09-08 19:00:04: Wafer arm problems Message-ID: Same problems happened to my wafers; Elmer is now working on it. From eenriquez at snf.stanford.edu Wed Sep 8 19:25:58 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Sep 2010 19:25:58 -0700 Subject: Comment gasonics SNF 2010-09-08 19:25:58: Update dropped wafers Message-ID: Made major adjustments to the unload arm and tray. Now the tool is runable. Ran 6 wafers with no problems. Need to make minor adjument to the load arm tomorrow. From eenriquez at snf.stanford.edu Thu Sep 9 11:27:11 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Sep 2010 11:27:11 -0700 Subject: Comment gasonics SNF 2010-09-08 19:25:58: Update dropped wafers Message-ID: Adjusted the loader arm height and cycled wafers with no problems. From bchui at snf.stanford.edu Thu Sep 9 16:49:07 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 9 Sep 2010 16:49:07 -0700 Subject: Comment gasonics SNF 2010-09-09 16:49:07: Arms OK now Message-ID: From eenriquez at snf.stanford.edu Fri Sep 10 12:22:38 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Sep 2010 12:22:38 -0700 Subject: Comment gasonics SNF 2010-09-10 12:22:37: Handling check Message-ID: Cycled 24 wafers with no problems. From eenriquez at snf.stanford.edu Wed Sep 15 11:13:56 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Sep 2010 11:13:56 -0700 Subject: Comment gasonics SNF 2010-09-10 12:22:37: Handling check Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 15 11:14:15 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Sep 2010 11:14:15 -0700 Subject: Comment gasonics SNF 2010-09-08 19:00:04: Wafer arm problems Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 15 11:14:24 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Sep 2010 11:14:24 -0700 Subject: Comment gasonics SNF 2010-09-09 16:49:07: Arms OK now Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 15 11:40:50 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Sep 2010 11:40:50 -0700 Subject: Problem gasonics SNF 2010-09-03 14:59:15: Input arm catching on wafer Message-ID: Major realignmet of the load and unload arm on 9/8. Cycled many wafers without any problems. From eenriquez at snf.stanford.edu Wed Sep 15 11:41:14 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Sep 2010 11:41:14 -0700 Subject: Comment gasonics SNF 2010-07-26 14:38:23: Update Output cassette full problem Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 15 11:41:36 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Sep 2010 11:41:36 -0700 Subject: Problem gasonics SNF 2010-09-03 15:55:13: handling problem Message-ID: Major realignmet of the load and unload arm on 9/8. Cycled many wafers without any problems. From eenriquez at snf.stanford.edu Wed Sep 15 11:41:42 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Sep 2010 11:41:42 -0700 Subject: Problem gasonics SNF 2010-09-05 13:23:41: severe handling problems Message-ID: Major realignmet of the load and unload arm on 9/8. Cycled many wafers without any problems. From eenriquez at snf.stanford.edu Wed Sep 15 11:41:48 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Sep 2010 11:41:48 -0700 Subject: Problem gasonics SNF 2010-09-06 15:00:46: wafer can not load correctly Message-ID: Major realignmet of the load and unload arm on 9/8. Cycled many wafers without any problems. From eenriquez at snf.stanford.edu Wed Sep 15 11:41:57 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Sep 2010 11:41:57 -0700 Subject: Problem gasonics SNF 2010-09-07 15:34:32: load arm better, output arm still bad Message-ID: Major realignmet of the load and unload arm on 9/8. Cycled many wafers without any problems. From eenriquez at snf.stanford.edu Wed Sep 15 11:54:42 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Sep 2010 11:54:42 -0700 Subject: Comment gasonics SNF 2010-09-15 11:54:41: Handling monitor Message-ID: Cycled 34 wafers with no problems. From eenriquez at snf.stanford.edu Mon Sep 20 11:25:36 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:25:36 -0700 Subject: Problem gasonics SNF 2010-09-08 17:25:51: dropped wafer during unload Message-ID: Major wafer handler realignment. No handling problems in 12 days From eenriquez at snf.stanford.edu Mon Sep 20 11:26:35 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:26:35 -0700 Subject: Problem gasonics SNF 2010-05-07 19:06:30: got output cassette full error Message-ID: Have not observed this problem in months From eenriquez at snf.stanford.edu Mon Sep 20 11:27:12 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:27:12 -0700 Subject: Problem gasonics SNF 2010-04-05 23:25:59: load arm cannot acquire a wafer Message-ID: Major wafer handler realignment. No handler problem observed From eenriquez at snf.stanford.edu Mon Sep 20 11:27:50 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:27:50 -0700 Subject: Problem gasonics SNF 2010-04-05 20:54:56: Not working for me either Message-ID: Wafer handler component realignment. No problems observed From eenriquez at snf.stanford.edu Mon Sep 20 11:28:16 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:28:16 -0700 Subject: Problem gasonics SNF 2010-01-25 22:53:21: error message; no reset Message-ID: Have not observed this problem in months. From eenriquez at snf.stanford.edu Mon Sep 20 11:28:54 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:28:54 -0700 Subject: Problem gasonics SNF 2010-04-05 20:33:36: robot arm cannot load in wafers Message-ID: Wafer handler realignment. No handling problem observed. From eenriquez at snf.stanford.edu Mon Sep 20 11:29:10 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:29:10 -0700 Subject: Comment gasonics SNF 2010-09-15 11:54:41: Handling monitor Message-ID: Archived From eenriquez at snf.stanford.edu Mon Sep 20 11:29:25 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:29:25 -0700 Subject: Comment gasonics SNF 2010-05-17 22:28:14: Same error for previous user Message-ID: Archived From eenriquez at snf.stanford.edu Mon Sep 20 11:29:31 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:29:31 -0700 Subject: Comment gasonics SNF 2010-04-07 23:44:24: worked OK for me, thank you. Message-ID: Archived From eenriquez at snf.stanford.edu Mon Sep 20 11:30:07 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:30:07 -0700 Subject: Comment gasonics SNF 2010-03-27 10:22:23: RF error Message-ID: Problem was caused by insufficient exhaust. From eenriquez at snf.stanford.edu Mon Sep 20 11:30:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:30:30 -0700 Subject: Comment gasonics SNF 2010-03-16 13:19:36: RF warning update Message-ID: This problem was caused by insufficient exhaust From eenriquez at snf.stanford.edu Mon Sep 20 11:30:41 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:30:41 -0700 Subject: Comment gasonics SNF 2010-03-02 13:55:02: I was able to 'baby' my wafers through.... Message-ID: Archived From eenriquez at snf.stanford.edu Mon Sep 20 11:31:06 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:31:06 -0700 Subject: Comment gasonics SNF 2010-02-16 20:31:03: RF Warning Message-ID: This problem was caused by insufficient exhaust. From eenriquez at snf.stanford.edu Mon Sep 20 11:31:19 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:31:19 -0700 Subject: Comment gasonics SNF 2010-01-29 10:17:13: Update cassette full problem Message-ID: Archived From eenriquez at snf.stanford.edu Fri Sep 24 09:48:16 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Sep 2010 09:48:16 -0700 Subject: Comment gasonics SNF 2010-09-24 09:48:16: Completed monthly PM Message-ID: From barlian at snf.stanford.edu Wed Sep 29 22:43:37 2010 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Wed, 29 Sep 2010 22:43:37 -0700 Subject: Problem gasonics SNF 2010-09-29 22:43:36: wafer broken Message-ID: From eenriquez at snf.stanford.edu Thu Sep 30 07:58:31 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Sep 2010 07:58:31 -0700 Subject: Problem gasonics SNF 2010-09-29 22:43:36: wafer broken Message-ID: Cleaned up the loading area and chamber. Cycled 75 wafers with no problems.