Problem gasonics SNF 2010-09-05 13:23:41: severe handling problems

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Sun Sep 5 13:23:41 PDT 2010


avoid use if you do not know how to operate it in manual mode so that you can swap wafers on and off to avoid the loading problems.  currently the load arm hits the wafer carrier on the way out and the unload arm hits the wafer on the way to pick it up (knocking it off the carrier altogether).  definitely not safe to use on valuable wafers in automatic mode.




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