Comment gasonics SNF 2010-09-08 19:25:58: Update dropped wafers

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 8 19:25:58 PDT 2010


Made major adjustments to the unload arm and tray. Now the tool is runable. Ran 6 wafers with no problems. Need to make minor adjument to the load arm tomorrow.




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