Problem gasonics SNF 2010-09-29 22:43:36: wafer broken

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Sep 30 07:58:31 PDT 2010


Cleaned up the loading area and chamber.  Cycled 75 wafers with no problems.




More information about the gasonics-pcs mailing list