From eenriquez at snf.stanford.edu  Mon Apr  4 09:32:26 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 4 Apr 2011 09:32:26 -0700
Subject: Comment gasonics SNF 2011-03-08 20:35:49: receiver cassette really dirty
Message-ID: <mailman.777.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Cleaned cassette



From eenriquez at snf.stanford.edu  Mon Apr  4 09:32:32 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 4 Apr 2011 09:32:32 -0700
Subject: Comment gasonics SNF 2011-03-21 10:34:19: Pumped out O2 line
Message-ID: <mailman.778.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Archived



From xuanwu at snf.stanford.edu  Thu Apr 21 22:42:20 2011
From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu)
Date: Thu, 21 Apr 2011 22:42:20 -0700
Subject: Problem gasonics SNF 2011-04-21 22:42:20: Recipe 013
Message-ID: <mailman.779.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Not stripping like it used to.  I ran recipe 013 twice on a 3612 1.0 um resist.  Broken lamps inside?



From latta at snf.stanford.edu  Fri Apr 22 15:18:33 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 22 Apr 2011 15:18:33 -0700
Subject: Problem gasonics SNF 2011-04-21 22:42:20: Recipe 013
Message-ID: <mailman.780.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Not sure if the user's wafer had badly damaged PR, I stripped 3612 1.6um PR with recipe 013 without any problem....