Problem gasonics SNF 2011-04-21 22:42:20: Recipe 013

xuanwu at snf.stanford.edu xuanwu at snf.stanford.edu
Thu Apr 21 22:42:20 PDT 2011


Not stripping like it used to.  I ran recipe 013 twice on a 3612 1.0 um resist.  Broken lamps inside?




More information about the gasonics-pcs mailing list