From mdickey at snf.stanford.edu  Mon Aug  1 07:04:53 2011
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 1 Aug 2011 07:04:53 -0700
Subject: Comment gasonics SNF 2011-07-31 22:46:58: door not closed
Message-ID: <mailman.783.1356281736.3883.gasonics-pcs@snf.stanford.edu>

error cleared



From mdickey at snf.stanford.edu  Mon Aug  1 07:30:27 2011
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 1 Aug 2011 07:30:27 -0700
Subject: Comment gasonics SNF 2011-08-01 07:30:26: cleared problem
Message-ID: <mailman.784.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Cycled 13 wafers with no problems



From mdickey at snf.stanford.edu  Mon Aug  1 07:30:52 2011
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 1 Aug 2011 07:30:52 -0700
Subject: Problem gasonics SNF 2011-07-31 19:48:45: door can not be closed
Message-ID: <mailman.785.1356281736.3883.gasonics-pcs@snf.stanford.edu>

cleared error



From grahamab at snf.stanford.edu  Fri Aug 12 09:28:34 2011
From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu)
Date: Fri, 12 Aug 2011 09:28:34 -0700
Subject: Comment gasonics SNF 2011-08-12 09:28:34: skipped slot in return cassette
Message-ID: <mailman.786.1356281736.3883.gasonics-pcs@snf.stanford.edu>

I didn't try to replicate this, but it returned my first wafer to the top slot and then returned my second wafer to the 3rd slot down.  users with a mostly full cassette might want to watch the tool for any similar problems.



From cbaxter at snf.stanford.edu  Thu Aug 25 20:45:43 2011
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 25 Aug 2011 20:45:43 -0700
Subject: Comment gasonics SNF 2011-08-12 09:28:34: skipped slot in return cassette
Message-ID: <mailman.787.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Adjusted reciever wafer present sensor..



From jparker at snf.stanford.edu  Mon Aug 29 14:36:40 2011
From: jparker at snf.stanford.edu (jparker at snf.stanford.edu)
Date: Mon, 29 Aug 2011 14:36:40 -0700
Subject: Shutdown gasonics SNF 2011-08-29 14:36:39: "Lamp 2 fails" error
Message-ID: <mailman.788.1356281736.3883.gasonics-pcs@snf.stanford.edu>

"Lamp 2 fails" error was showing in 3rd line of prompt screen while the tool was in hibernate mode. Loading a recipe and hitting start finishes the 30 seconds of "Warming up RF", then shows "lamp 2 fails" error again and prompts the user to abort.



From cbaxter at snf.stanford.edu  Tue Aug 30 08:50:05 2011
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 30 Aug 2011 08:50:05 -0700
Subject: Shutdown gasonics SNF 2011-08-29 14:36:39: "Lamp 2 fails" error
Message-ID: <mailman.789.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Mike and I chnaged the center lamp (225v/1000watts) and
cycled dummy wafers..