Comment gasonics SNF 2011-08-12 09:28:34: skipped slot in return cassette

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Fri Aug 12 09:28:34 PDT 2011


I didn't try to replicate this, but it returned my first wafer to the top slot and then returned my second wafer to the 3rd slot down.  users with a mostly full cassette might want to watch the tool for any similar problems.




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