From eldwin at snf.stanford.edu  Sun Dec  4 21:47:05 2011
From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu)
Date: Sun, 4 Dec 2011 21:47:05 -0800
Subject: Problem gasonics SNF 2011-12-04 21:47:05: plasma error
Message-ID: <mailman.823.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Encountered the plasma error very frequently, for every wafer after each step. Need to press start to resume.



From eenriquez at snf.stanford.edu  Mon Dec  5 10:04:12 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 5 Dec 2011 10:04:12 -0800
Subject: Shutdown gasonics SNF 2011-12-05 10:04:11: No plasma
Message-ID: <mailman.824.1356281737.3883.gasonics-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Tue Dec  6 15:52:00 2011
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 6 Dec 2011 15:52:00 -0800
Subject: Shutdown gasonics SNF 2011-12-05 10:04:11: No plasma
Message-ID: <mailman.825.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Cleaned the plasma detector sensor..



From cbaxter at snf.stanford.edu  Tue Dec  6 15:52:23 2011
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 6 Dec 2011 15:52:23 -0800
Subject: Problem gasonics SNF 2011-12-04 21:47:05: plasma error
Message-ID: <mailman.826.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Cleaned the plasma detector sensor..



From bchui at snf.stanford.edu  Wed Dec  7 19:09:14 2011
From: bchui at snf.stanford.edu (bchui at snf.stanford.edu)
Date: Wed, 7 Dec 2011 19:09:14 -0800
Subject: Problem gasonics SNF 2011-12-07 19:09:14: Still intermittent plasma failures
Message-ID: <mailman.827.1356281737.3883.gasonics-pcs@snf.stanford.edu>

say, once every five wafers.  If it happens, it always happens at the 15-second mark.



From eperalta at snf.stanford.edu  Thu Dec  8 05:44:05 2011
From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu)
Date: Thu, 8 Dec 2011 05:44:05 -0800
Subject: Problem gasonics SNF 2011-12-08 05:44:04: plasma failure at 15sec on prog 013
Message-ID: <mailman.828.1356281737.3883.gasonics-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Dec  8 17:00:47 2011
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 8 Dec 2011 17:00:47 -0800
Subject: Problem gasonics SNF 2011-12-08 05:44:04: plasma failure at 15sec on prog 013
Message-ID: <mailman.829.1356281737.3883.gasonics-pcs@snf.stanford.edu>

I re-cleaned the plasma detector sensor with ipa and
cycled 15 wafers using recipe 013 w/out problem.
We will order a new plasma detector sensor.



From cbaxter at snf.stanford.edu  Thu Dec  8 17:01:02 2011
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 8 Dec 2011 17:01:02 -0800
Subject: Problem gasonics SNF 2011-12-07 19:09:14: Still intermittent plasma failures
Message-ID: <mailman.830.1356281737.3883.gasonics-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Dec  8 17:01:40 2011
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 8 Dec 2011 17:01:40 -0800
Subject: Comment gasonics SNF 2011-12-08 17:01:40: Plasma detector
Message-ID: <mailman.831.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Ordering new plasma detector sensor..



From eenriquez at snf.stanford.edu  Wed Dec 14 14:10:29 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 14 Dec 2011 14:10:29 -0800
Subject: Shutdown gasonics SNF 2011-12-14 14:10:29: sheduled shutdown
Message-ID: <mailman.832.1356281737.3883.gasonics-pcs@snf.stanford.edu>