Problem gasonics SNF 2011-12-08 05:44:04: plasma failure at 15sec on prog 013

cbaxter at cbaxter at
Thu Dec 8 17:00:47 PST 2011

I re-cleaned the plasma detector sensor with ipa and
cycled 15 wafers using recipe 013 w/out problem.
We will order a new plasma detector sensor.

More information about the gasonics-pcs mailing list