Problem gasonics SNF 2011-12-08 05:44:04: plasma failure at 15sec on prog 013

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Dec 8 17:00:47 PST 2011


I re-cleaned the plasma detector sensor with ipa and
cycled 15 wafers using recipe 013 w/out problem.
We will order a new plasma detector sensor.




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