From cbaxter at snf.stanford.edu  Tue Feb 15 08:23:05 2011
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 15 Feb 2011 08:23:05 -0800
Subject: Shutdown gasonics SNF 2011-02-15 08:23:03: PM
Message-ID: <mailman.766.1356281736.3883.gasonics-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Feb 16 10:24:57 2011
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 16 Feb 2011 10:24:57 -0800
Subject: Shutdown gasonics SNF 2011-02-15 08:23:03: PM
Message-ID: <mailman.767.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Completed quarterly pm, chamber will need qual..



From latta at snf.stanford.edu  Thu Feb 17 14:39:30 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 17 Feb 2011 14:39:30 -0800
Subject: Shutdown gasonics SNF 2011-02-17 14:39:30: not stripping wafers & nonuniform
Message-ID: <mailman.768.1356281736.3883.gasonics-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Sat Feb 19 18:42:31 2011
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sat, 19 Feb 2011 18:42:31 -0800
Subject: Shutdown gasonics SNF 2011-02-17 14:39:30: not stripping wafers & nonuniform
Message-ID: <mailman.769.1356281736.3883.gasonics-pcs@snf.stanford.edu>

The back interlock became unlatch and the rf enable was not 
returning on, secured back interlock latched  switch.
BChui strip two of his wafers w/out problem. Also made
minor adjustement on sender wafer load arm.