Shutdown gasonics SNF 2011-02-17 14:39:30: not stripping wafers & nonuniform

cbaxter at cbaxter at
Sat Feb 19 18:42:31 PST 2011

The back interlock became unlatch and the rf enable was not 
returning on, secured back interlock latched  switch.
BChui strip two of his wafers w/out problem. Also made
minor adjustement on sender wafer load arm.

More information about the gasonics-pcs mailing list