From eenriquez at snf.stanford.edu Mon Jan 3 15:15:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Jan 2011 15:15:22 -0800 Subject: Shutdown gasonics SNF 2011-01-03 15:15:22: Handler problem Message-ID: From eenriquez at snf.stanford.edu Wed Jan 5 17:28:13 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Jan 2011 17:28:13 -0800 Subject: Shutdown gasonics SNF 2011-01-03 15:15:22: Handler problem Message-ID: Reseated the unload indexer interface connector. Cleaned and lubricated pneumatic solenoid for the load arm. Cycled wafers with no problems. From eenriquez at snf.stanford.edu Wed Jan 5 17:28:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Jan 2011 17:28:22 -0800 Subject: Comment gasonics SNF 2010-10-22 09:27:23: Completed monthly PM Message-ID: Archived From latta at snf.stanford.edu Thu Jan 6 17:22:26 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 6 Jan 2011 17:22:26 -0800 Subject: Problem gasonics SNF 2011-01-06 17:22:25: Not stripping resist Message-ID: Seems to have gotten worse as the day wore on. But, the indexer is great! From mdickey at snf.stanford.edu Fri Jan 7 10:08:07 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 7 Jan 2011 10:08:07 -0800 Subject: Shutdown gasonics SNF 2011-01-07 10:08:07: handling problem Message-ID: down for handling problem From eenriquez at snf.stanford.edu Fri Jan 7 15:23:09 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Jan 2011 15:23:09 -0800 Subject: Comment gasonics SNF 2011-01-07 15:23:08: Update Message-ID: The unload indexer is not sensing the wafer. From latta at snf.stanford.edu Wed Jan 12 17:03:50 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 12 Jan 2011 17:03:50 -0800 Subject: Problem gasonics SNF 2011-01-12 17:03:49: Field service was here and they; Message-ID: 1) replaced and adjusted the indexers 2) calibrated gases 3) created a standard recipe (named 3) with the followinf parameters; O2 = 4.5, N2 = 0.5, lamp1 = 12sec, lamp2 = 60sec, lamp3 = 12sec, strip time = 60sec. NOTE; the other recipes need to be checked and changed. Until that is complete, please use recipe #3 multiple times for thick or damaged resist. From latta at snf.stanford.edu Wed Jan 12 17:04:42 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 12 Jan 2011 17:04:42 -0800 Subject: Shutdown gasonics SNF 2011-01-07 10:08:07: handling problem Message-ID: FSE out here and problem is fixed- ran over 50 wafers after indexer replacement. From eenriquez at snf.stanford.edu Thu Jan 13 15:01:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 13 Jan 2011 15:01:52 -0800 Subject: Problem gasonics SNF 2011-01-06 17:22:25: Not stripping resist Message-ID: Corrected the recipe. From eenriquez at snf.stanford.edu Thu Jan 13 15:02:01 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 13 Jan 2011 15:02:01 -0800 Subject: Comment gasonics SNF 2011-01-07 15:23:08: Update Message-ID: Archived From mtang at snf.stanford.edu Thu Jan 13 16:43:22 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 13 Jan 2011 16:43:22 -0800 Subject: Problem gasonics SNF 2011-01-13 16:43:21: Unload delay and flows Message-ID: Please note two changes on the system: 1. The unload now has a 10 second delay before placing the processed wafer into the receiver cassette. This is to allow the hot wafer to cool down and minimize heat damage to the receiver cassette. 2. The gas flows are now set at O2 = 4.5 lpm and N2 = 0.5 lpm. There appears to be a problem with the O2 MFC in that it doesn't control at 3 lpm. Until this can be addressed, the process should not be affected by high gas flows. From mtang at snf.stanford.edu Thu Jan 13 16:45:07 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 13 Jan 2011 16:45:07 -0800 Subject: Problem gasonics SNF 2011-01-12 17:03:49: Field service was here and they; Message-ID: Recipes were changed back to the way they were, except for higher O2 and N2 flows (see problem report of 1/13/11.) The system can be run as it normally is (with "013" as the standard 1 or 1.6 micron strip.) Be aware that the unload delay is now at 10 seconds to allow the wafer to cool off. From karthikv at snf.stanford.edu Thu Jan 20 13:44:54 2011 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Thu, 20 Jan 2011 13:44:54 -0800 Subject: Problem gasonics SNF 2011-01-20 13:44:54: resist not clearing everywhere Message-ID: Ran program 014 on 1um 3612 as spun resist. There was some resist left on the outer edge of the wafer closer to the operator when facing the tool. From cbaxter at snf.stanford.edu Fri Jan 21 23:24:01 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 21 Jan 2011 23:24:01 -0800 Subject: Problem gasonics SNF 2011-01-20 13:44:54: resist not clearing everywhere Message-ID: I removed the lower quartz window and cleaned with water and ipa.