Shutdown gasonics SNF 2011-01-03 15:15:22: Handler problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jan 5 17:28:13 PST 2011


Reseated the unload indexer interface connector.  Cleaned and lubricated pneumatic solenoid for the load arm.  Cycled wafers with no problems.




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