Problem gasonics SNF 2011-01-12 17:03:49: Field service was here and they;

mtang at snf.stanford.edu mtang at snf.stanford.edu
Thu Jan 13 16:45:07 PST 2011


Recipes were changed back to the way they were, except for higher O2 and N2 flows (see problem report of 1/13/11.)  The system can be run as it normally is (with "013" as the standard 1 or 1.6 micron strip.)  Be aware that the unload delay is now at 10 seconds to allow the wafer to cool off.




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