Problem gasonics SNF 2011-01-20 13:44:54: resist not clearing everywhere

karthikv at snf.stanford.edu karthikv at snf.stanford.edu
Thu Jan 20 13:44:54 PST 2011


Ran program 014 on 1um 3612 as spun resist. There was some resist left on the outer edge of the wafer closer to the operator when facing the tool.




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