From kosarb at snf.stanford.edu  Sun Jul 31 19:48:46 2011
From: kosarb at snf.stanford.edu (kosarb at snf.stanford.edu)
Date: Sun, 31 Jul 2011 19:48:46 -0700
Subject: Problem gasonics SNF 2011-07-31 19:48:45: door can not be closed
Message-ID: <mailman.781.1356281736.3883.gasonics-pcs@snf.stanford.edu>




From barlian at snf.stanford.edu  Sun Jul 31 22:46:59 2011
From: barlian at snf.stanford.edu (barlian at snf.stanford.edu)
Date: Sun, 31 Jul 2011 22:46:59 -0700
Subject: Comment gasonics SNF 2011-07-31 22:46:58: door not closed
Message-ID: <mailman.782.1356281736.3883.gasonics-pcs@snf.stanford.edu>

i found the machine with the door not closed and with an error message saying so. i didn't process any wafer yet.