From mtang at snf.stanford.edu  Wed Mar  2 06:20:03 2011
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Wed, 2 Mar 2011 06:20:03 -0800
Subject: Problem gasonics SNF 2011-01-13 16:43:21: Unload delay and flows
Message-ID: <mailman.770.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Unload delay will remain to protect the receiver handler.  Cesar changed out the MFC and was able to achieve the standard process settings.  Nancy has run tests to qualify.



From fungus at snf.stanford.edu  Fri Mar  4 20:11:29 2011
From: fungus at snf.stanford.edu (fungus at snf.stanford.edu)
Date: Fri, 4 Mar 2011 20:11:29 -0800
Subject: Problem gasonics SNF 2011-03-04 20:11:29: error RF warning
Message-ID: <mailman.771.1356281736.3883.gasonics-pcs@snf.stanford.edu>

RF warning came up every time a wafer ran.  Wafers look good but error signal prevents automatic unloading of wafer.



From cbaxter at snf.stanford.edu  Sun Mar  6 18:38:14 2011
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sun, 6 Mar 2011 18:38:14 -0800
Subject: Problem gasonics SNF 2011-03-04 20:11:29: error RF warning
Message-ID: <mailman.772.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Adjusted tuning slug 1/4 cw..



From xuanwu at snf.stanford.edu  Tue Mar  8 20:35:50 2011
From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu)
Date: Tue, 8 Mar 2011 20:35:50 -0800
Subject: Comment gasonics SNF 2011-03-08 20:35:49: receiver cassette really dirty
Message-ID: <mailman.773.1356281736.3883.gasonics-pcs@snf.stanford.edu>

I get pieces of what seems like ashed resist on my wafers (and they seem to be on the receiver cassette as well... those black dots).



From eenriquez at snf.stanford.edu  Mon Mar 21 10:34:20 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 21 Mar 2011 10:34:20 -0700
Subject: Comment gasonics SNF 2011-03-21 10:34:19: Pumped out O2 line
Message-ID: <mailman.774.1356281736.3883.gasonics-pcs@snf.stanford.edu>

O2 line was contaminated with N2 (pink plasma).  Pumped out the gas line.



From jcdoll at snf.stanford.edu  Mon Mar 21 15:26:16 2011
From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu)
Date: Mon, 21 Mar 2011 15:26:16 -0700
Subject: Problem gasonics SNF 2011-03-21 15:26:15: error RF warning
Message-ID: <mailman.775.1356281736.3883.gasonics-pcs@snf.stanford.edu>

ran 7 wafers (program 0D) and had the RF warning come up at the end of the last 4.



From eenriquez at snf.stanford.edu  Tue Mar 22 09:34:10 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 22 Mar 2011 09:34:10 -0700
Subject: Problem gasonics SNF 2011-03-21 15:26:15: error RF warning
Message-ID: <mailman.776.1356281736.3883.gasonics-pcs@snf.stanford.edu>

Someone closed the exhaust dampers.  Readjusted the exhaust.  Cycled many wafers without problems.