Problem gasonics SNF 2011-03-04 20:11:29: error RF warning

fungus at snf.stanford.edu fungus at snf.stanford.edu
Fri Mar 4 20:11:29 PST 2011


RF warning came up every time a wafer ran.  Wafers look good but error signal prevents automatic unloading of wafer.




More information about the gasonics-pcs mailing list