From eenriquez at snf.stanford.edu  Tue Nov  1 11:34:56 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 1 Nov 2011 11:34:56 -0700
Subject: Problem gasonics SNF 2011-10-31 20:16:34: Gasonic chamber should be cleaned
Message-ID: <mailman.812.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Clean the chamber and cycled wafers.



From ywidjaja at snf.stanford.edu  Wed Nov  9 04:22:48 2011
From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu)
Date: Wed, 9 Nov 2011 04:22:48 -0800
Subject: Problem gasonics SNF 2011-11-09 04:22:47: load arm not fully up error
Message-ID: <mailman.813.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Have to press start for almost every wafer.



From chienyuc at snf.stanford.edu  Wed Nov  9 18:23:41 2011
From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu)
Date: Wed, 9 Nov 2011 18:23:41 -0800
Subject: Comment gasonics SNF 2011-11-09 18:23:40: Load arm positioning offed
Message-ID: <mailman.814.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Load arm not fully up at every wafer and will not place wafer right at the pins.  



From eenriquez at snf.stanford.edu  Fri Nov 11 13:16:15 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 11 Nov 2011 13:16:15 -0800
Subject: Comment gasonics SNF 2011-11-11 13:16:15: Update load arm
Message-ID: <mailman.815.1356281737.3883.gasonics-pcs@snf.stanford.edu>

The load arm solenoid valve is leaking.  We will replace the valve today.



From eenriquez at snf.stanford.edu  Fri Nov 11 14:07:29 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 11 Nov 2011 14:07:29 -0800
Subject: Problem gasonics SNF 2011-11-09 04:22:47: load arm not fully up error
Message-ID: <mailman.816.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Replaced load arm solenoid valve.



From eenriquez at snf.stanford.edu  Fri Nov 11 14:07:41 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 11 Nov 2011 14:07:41 -0800
Subject: Comment gasonics SNF 2011-11-09 18:23:40: Load arm positioning offed
Message-ID: <mailman.817.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Fri Nov 11 14:07:48 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 11 Nov 2011 14:07:48 -0800
Subject: Comment gasonics SNF 2011-11-11 13:16:15: Update load arm
Message-ID: <mailman.818.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Archived



From mislam at snf.stanford.edu  Sat Nov 19 08:30:42 2011
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Sat, 19 Nov 2011 08:30:42 -0800
Subject: Problem gasonics SNF 2011-11-19 08:30:42: Unload cassette missing
Message-ID: <mailman.819.1356281737.3883.gasonics-pcs@snf.stanford.edu>




From mislam at snf.stanford.edu  Sat Nov 19 08:43:17 2011
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Sat, 19 Nov 2011 08:43:17 -0800
Subject: Comment gasonics SNF 2011-11-19 08:43:17: Unload Cassette found
Message-ID: <mailman.820.1356281737.3883.gasonics-pcs@snf.stanford.edu>




From shott at snf.stanford.edu  Sat Nov 19 09:15:58 2011
From: shott at snf.stanford.edu (shott at snf.stanford.edu)
Date: Sat, 19 Nov 2011 09:15:58 -0800
Subject: Problem gasonics SNF 2011-11-19 08:30:42: Unload cassette missing
Message-ID: <mailman.821.1356281737.3883.gasonics-pcs@snf.stanford.edu>

mislam found unload cassette ...
John



From shott at snf.stanford.edu  Sat Nov 19 09:16:07 2011
From: shott at snf.stanford.edu (shott at snf.stanford.edu)
Date: Sat, 19 Nov 2011 09:16:07 -0800
Subject: Comment gasonics SNF 2011-11-19 08:43:17: Unload Cassette found
Message-ID: <mailman.822.1356281737.3883.gasonics-pcs@snf.stanford.edu>

mislam found unload cassette ...
John