From sgchong at snf.stanford.edu Sat Oct 1 15:33:11 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sat, 1 Oct 2011 15:33:11 -0700 Subject: Comment gasonics SNF 2011-10-01 15:33:11: Load arm not fully up Message-ID: I got the error message, "load arm not fully up" for every wafer. Pressing start to resume solves the problem. From grahamab at snf.stanford.edu Sun Oct 2 18:45:10 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 2 Oct 2011 18:45:10 -0700 Subject: Problem gasonics SNF 2011-10-02 18:45:09: load arm not fully up errors Message-ID: received this error on 10 of 10 wafers. retrying worked every time, but the intial try mostly sounds like some light hissing and the load arm not going anywhere. I also think the system is venting properly as it seems to be pulling the seal free on every unload. there is a distinct popping sound of the chamber venting when the door finally breaks free. From cbaxter at snf.stanford.edu Mon Oct 3 14:52:15 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 3 Oct 2011 14:52:15 -0700 Subject: Problem gasonics SNF 2011-10-02 18:45:09: load arm not fully up errors Message-ID: For now I adjusted the input air to 60psi to speed up the load arm out travel. Will order a replacement bimba cylinder asap. cycled wafers w/out hang up. From cbaxter at snf.stanford.edu Mon Oct 3 14:52:33 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 3 Oct 2011 14:52:33 -0700 Subject: Comment gasonics SNF 2011-10-01 15:33:11: Load arm not fully up Message-ID: From grahamab at snf.stanford.edu Tue Oct 4 09:06:12 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 4 Oct 2011 09:06:12 -0700 Subject: Problem gasonics SNF 2011-10-04 09:06:12: load arm not fully up Message-ID: still getting load arm not fully up error on wafer pick up and then again before dropping the wafer on the loader. From cbaxter at snf.stanford.edu Tue Oct 4 13:49:46 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 4 Oct 2011 13:49:46 -0700 Subject: Problem gasonics SNF 2011-10-04 09:06:12: load arm not fully up Message-ID: Changed load arm bimba cylinder and cycled wafers w/out problem. From eenriquez at snf.stanford.edu Wed Oct 5 11:41:34 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Oct 2011 11:41:34 -0700 Subject: Comment gasonics SNF 2011-09-30 13:12:57: ready for qual Message-ID: Archived From jsnapp at snf.stanford.edu Mon Oct 17 11:00:58 2011 From: jsnapp at snf.stanford.edu (jsnapp at snf.stanford.edu) Date: Mon, 17 Oct 2011 11:00:58 -0700 Subject: Problem gasonics SNF 2011-10-17 11:00:57: load unload arms not going full up down Message-ID: Machine kept erroring and reporting that the unload and load arms were not going full up and down. From cbaxter at snf.stanford.edu Mon Oct 17 14:16:34 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 Oct 2011 14:16:34 -0700 Subject: Problem gasonics SNF 2011-10-17 11:00:57: load unload arms not going full up down Message-ID: Removed load big up plunger and cleaned, cycled wafer from load to receiver with out Will order a replacement plunger. From lupin000 at snf.stanford.edu Mon Oct 31 20:16:34 2011 From: lupin000 at snf.stanford.edu (lupin000 at snf.stanford.edu) Date: Mon, 31 Oct 2011 20:16:34 -0700 Subject: Problem gasonics SNF 2011-10-31 20:16:34: Gasonic chamber should be cleaned Message-ID: I noticed some particles(Si or PR) on my wafers after using Gasonics. Besides, the cassettes used in Gasonics are also partially covered with those particles. I think the inside of chamber is not properly vented so that the small particles are generated.